The following options/upgrades are available for the Plasma Science-Plasma Technology Systems product line:
A liquid injection system is designed to deliver a liquid’s vapors to a plasma chamber in an accurate and repeatable manner. There are several methods to deliver accurate quantities of monomer as well as different methods to vaporize the liquid for delivery to the plasma chamber.
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A syringe pump is recommended for short production runs or experimental trials where different process liquids are being investigated. Example flow rates are between 2 – 10 ml/hr. Use and cleaning of the syringe pump is simple.
For continuous or dedicated production, a precision positive displacement pump is recommended. |
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The “hot tube” is ideal for low boiling point liquids. The Hot Tube is comprised of a fluoropolymer tube wrapped with a heating element and covered with insulator and a protective braid. Temperatures are rated up to 130°C.
The PTS Flash Evaporator System accepts precisely metered liquid feed from the liquid delivery system (e.g., syringe or metering pump) and effects a “flash evaporation” of the feed stream(s). The resulting vapor is mixed with user supplied carrier gas for delivery to the plasma chamber. It has been designed for a maximum use temperature of 150°C limited by the o-ring seals. |
Plasma Science and Plasma Technology Systems may be upgraded to include chamber heating for temperatures up to 100°C.
Specification Sheet
Drop in replacement HMI-PLC units are provided for stock Plasma Science Advanced Energy process controllers. The Plasma HMI System monitors and controls the Plasma System Process Controller, allowing the operator to initiate a process in automatic mode, change recipes, change set points, and manually activate devices, view trends, view alarms and export data for analysis.
The system consists of or allows:
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Allen Bradley PLC |
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Wonderware (21 CFR Part 11 compliant) |
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HMI 15” touch screen |
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Windows XP |
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Applicable software licenses |
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Recipe management through Wonderware allowing for storage capabilities of a minimum of 500 process recipes with up to five separate steps each |
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Control for up to two external optional relay-driven liquid pumps |
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Visual and audible alarms |
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Alarm banner |
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Multiple user levels controlled by Administrator |
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Manual and Automatic mode operations for authorized user |
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Simultaneous viewing of parameters |
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Separate screens for:
  Recipe management
Lot information
Manual set points
Displaying active, acknowledged and historical alarms
Trend viewing and plotting of all parameters
Viewing process variables for present recipe step
Setting limits
Data logging of parameters |
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Connections for USB, Network Cable |
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Connectors for Keyboard and Mouse |
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Illustrative operations manual |
An optional Uninterruptible Power Supply can be provided to prevent damage due to unexpected power outages or inadvertent system shut downs.
Sample Graphic Screen for HMI
PTS supply a low cost, portable USB or Ethernet data logger for recording up to eight key parameters such as:
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Setpoint Power |
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Setpoint MFC 1 |
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Setpoint MFC 2 |
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Setpoint MFC 3 |
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Actual chamber pressure |
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Actual process Power |
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Actual Power forward |
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Actual Power reflected |
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Actual MFC 1 flow |
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Actual MFC 2 flow |
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Actual MFC 3 flow |
The instrument may be tethered to a PC/Network and data monitored via a preferred program or the data may be stored to a stand-alone digital memory card and transported to any reader. Software is included allowing for reviewing, measuring and analyzing data during or after a recording session.
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