PTS was formed to support existing Plasma Science equipment owners
with both maintenance and inventory
services. Our services are structured to meet the customer's needs.
and Plasma Technology Systems’ equipment has been designed
as a rugged laboratory or manufacturing system to provide reliable
performance in manufacturing environments. Like all sophisticated
electro-mechanical process systems it is recommended to have a
qualified service engineer conduct preventative maintenance inspection
and calibration at least annually depending on system use and
age. We suggest scheduling a routine service at one year or 2000
hours, which ever occurs first.This service
evaluates the performance of the pump, the integrity of chamber,
as well as calibration of electronic controlled components such
as the mass flow controllers, pressure manometer and the RF generator.
Equipment so maintained rarely suffers unscheduled breakdowns.
As stated earlier Plasma Science equipment is designed for heavy
use in manufacturing environments and many customers do not have
routine service and have years of productivity before suffering
unscheduled stoppage. However, many modern manufacturing protocols
demand routine calibration of electronic components; this is best
accomplished by a service engineer that is familiar with the overall
operation and design philosophy of the total plasma system.
A service contract provides four benefits:
routine maintenance to keep equipment and process reliable
24 hr. emergency response to unscheduled breakdowns
of any needed major components, such as the RF generator,
matching network or process controller, while these items
are repaired (vacuum pump excluded)
no-cost phone support (otherwise $100/hour)
us to discuss the recommended service schedule for your system
application(s) and the provision of an agreement for your review.
without a maintenance agreement are billed at a rate of $165 hour
of required service engineer’s time, plus direct travel
and travel related costs exclusive of consumables such as lamps,
fuses and vacuum pump oils. Based on our extensive service
knowledge, our service engineers will try to bring any anticipated
parts or components to the call. We stock all components used
in the manufacturing of standard Plasma Science systems.
We suggest contacting us 30 days in advance to schedule a visit
to your facility. An estimated quote will be provided. Phone support
is available for $100 hour. Emergency services are available but
we cannot guarantee 24 hour service. Components such as the RF
Generator and pumps are available for rent with a minimum monthly
us to discuss the recommended service schedule and pricing.
component calibration and repair services are available:
|Match Network Systems
custom equipment modification services to include mechanical liquid
injection systems to automated doors. Please contact us for a
quotation for your application.
not service pumps. The Operations Manual details recommended pump
maintenance (checking oil level and replenishing as necessary;
changing the oil filter). During PTS service visits, our engineer
will recommend maintenance if appropriate. If you are having pumping
difficulties we can forward you to the factor authorized representative
or recommended service centers.
PTS offer customers options for upgrading, refurbishing or reconditioning
Plasma Science equipment. The service is provided at the California
maintenance facility. Three levels of service are available:
The service includes an inspection with provision of a report detailing
suggested items for replacement, refurbishment and or upgrade. Cost
options are detailed for each item. A complete report with calibration
and warranty details is forwarded at the completion of the job.
The lead time, depending on work-in-hand, is approximately 2 weeks
from receipt of the system and purchase order.
The system is calibrated and refurbished to all original
manufacturing specifications, with components replaced or
repaired (as needed) to meet this requirement. Warranties
vary depending on condition of system
The system is calibrated and reconditioned to all original
manufacturing specifications with new components not limited
to the MFCs, manometer, isolation
valve and the generator. This option includes a fully reconditioned
matching network. The warranty for this system is 1 year
parts and labor with up to a 3 year warranty on components
such as the MFC. A new generator's typical mean-time between-failure
is 10 years.
service includes refurbishment or reconditioning in addition
to replacement of the process controller with a human-machine
interface touch screen PLC.
PTS do not service pumps however we will assist with coordinating
service for pumping systems. PTS maintain a list of approved vendors.
For customers considering this option, please contact Mikki Larner
for additional information. We ask that all customers follow the
PTS decommissioning instructions to ensure safe transportation of
the system. Please reference the following decommissioning instructions: PS0350/PS0300/PS0500
Call for other system instructions.